The volatility of new bis- and tetrakis-(pyrazo1yl)borates of copper(1) with monodentate tertiary phosphines recently prepared has been prepared by the reaction between CuCI, phosphine and KBH2pz2 or KBpz, in CH3CN (Hpz is a pyrazole-type ligand) has been studied. The IR data in gas in a vast temperature region confirm the stability of precursors in vapour, suggesting the molecular structure in vapour being similar to that determined previously by X-ray difiaction. The dependence of the volatility on the number of the pyrazolyl-moieties and nature of phosphine is discussed. Film growth rates obtained &om MOCVD experiments, as well as XRD and SEM data for copper films deposited by using [CU&B(~~)~(PM~P~~)~] as precursor are reported.
New volatile polyazolylborates of copper(I) for MOCVD
PETTINARI C.;MARCHETTI F.;SANTINI C.;PETTINARI R.;
2001-01-01
Abstract
The volatility of new bis- and tetrakis-(pyrazo1yl)borates of copper(1) with monodentate tertiary phosphines recently prepared has been prepared by the reaction between CuCI, phosphine and KBH2pz2 or KBpz, in CH3CN (Hpz is a pyrazole-type ligand) has been studied. The IR data in gas in a vast temperature region confirm the stability of precursors in vapour, suggesting the molecular structure in vapour being similar to that determined previously by X-ray difiaction. The dependence of the volatility on the number of the pyrazolyl-moieties and nature of phosphine is discussed. Film growth rates obtained &om MOCVD experiments, as well as XRD and SEM data for copper films deposited by using [CU&B(~~)~(PM~P~~)~] as precursor are reported.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
